Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139352 | Measurement of small box size targets | Stilian Ivanov Pandev, Wei Lu, Andrei V. Shchegrov, Pablo I. Rovira | 2018-11-27 |
| 10101670 | Statistical model-based metrology | Stilian Ivanov Pandev | 2018-10-16 |
| 9875946 | On-device metrology | Andrei V. Shchegrov, Stilian Ivanov Pandev, Ady Levy, Daniel Kandel, Michael Adel +1 more | 2018-01-23 |