Issued Patents 2018
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10152678 | System, method and computer program product for combining raw data from multiple metrology tools | Stilian Ivanov Pandev, Thaddeus Gerard Dziura | 2018-12-11 |
| 10151986 | Signal response metrology based on measurements of proxy structures | Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Leonid Poslavsky | 2018-12-11 |
| 10139352 | Measurement of small box size targets | Stilian Ivanov Pandev, Wei Lu, Pablo I. Rovira, Jonathan M. Madsen | 2018-11-27 |
| 10107765 | Apparatus, techniques, and target designs for measuring semiconductor parameters | Noam Sapiens, Stilian Ivanov Pandev | 2018-10-23 |
| 10062157 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Gregory Brady, Noam Sapiens, John J. Hench | 2018-08-28 |
| 10013518 | Model building and analysis engine for combined X-ray and optical metrology | Michael S. Bakeman, Qiang Zhao, Zhengquan Tan | 2018-07-03 |
| 10006865 | Confined illumination for small spot size metrology | Derrick Shaughnessy, Michael S. Bakeman, Guorong V. Zhuang, Leonid Poslavsky | 2018-06-26 |
| 9915524 | Optical metrology with small illumination spot size | Noam Sapiens, Kevin Peterlinz, Alexander Buettner, Kerstin Purrucker | 2018-03-13 |
| 9885962 | Methods and apparatus for measuring semiconductor device overlay using X-ray metrology | Andrei Veldman, Michael S. Bakeman, Walter D. Mieher | 2018-02-06 |
| 9879977 | Apparatus and method for optical metrology with optimized system parameters | — | 2018-01-30 |
| 9875946 | On-device metrology | Jonathan M. Madsen, Stilian Ivanov Pandev, Ady Levy, Daniel Kandel, Michael Adel +1 more | 2018-01-23 |