Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101676 | Spectroscopic beam profile overlay metrology | Jiyou Fu, Noam Sapiens, Stilian Ivanov Pandev | 2018-10-16 |
| 10072921 | Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element | Jiyou Fu, Noam Sapiens, Stilian Ivanov Pandev | 2018-09-11 |
| 9915524 | Optical metrology with small illumination spot size | Noam Sapiens, Alexander Buettner, Kerstin Purrucker, Andrei V. Shchegrov | 2018-03-13 |