Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101676 | Spectroscopic beam profile overlay metrology | Noam Sapiens, Kevin Peterlinz, Stilian Ivanov Pandev | 2018-10-16 |
| 10072921 | Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element | Noam Sapiens, Kevin Peterlinz, Stilian Ivanov Pandev | 2018-09-11 |