Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10107765 | Apparatus, techniques, and target designs for measuring semiconductor parameters | Andrei V. Shchegrov, Stilian Ivanov Pandev | 2018-10-23 |
| 10101676 | Spectroscopic beam profile overlay metrology | Jiyou Fu, Kevin Peterlinz, Stilian Ivanov Pandev | 2018-10-16 |
| 10072921 | Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element | Jiyou Fu, Kevin Peterlinz, Stilian Ivanov Pandev | 2018-09-11 |
| 10062157 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Gregory Brady, Andrei V. Shchegrov, John J. Hench | 2018-08-28 |
| 9915524 | Optical metrology with small illumination spot size | Kevin Peterlinz, Alexander Buettner, Kerstin Purrucker, Andrei V. Shchegrov | 2018-03-13 |