Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9921104 | Simultaneous multi-angle spectroscopy | Shankar Krishnan, Kerstin Purrucker, David Y. Wang | 2018-03-20 |
| 9915524 | Optical metrology with small illumination spot size | Noam Sapiens, Kevin Peterlinz, Kerstin Purrucker, Andrei V. Shchegrov | 2018-03-13 |