Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9970863 | Optical metrology with reduced focus error sensitivity | Shankar Krishnan, Guorong V. Zhuang, Xuefeng Liu | 2018-05-15 |
| 9921104 | Simultaneous multi-angle spectroscopy | Shankar Krishnan, Alexander Buettner, Kerstin Purrucker | 2018-03-20 |
| 9921152 | Systems and methods for extended infrared spectroscopic ellipsometry | Shankar Krishnan | 2018-03-20 |
| 9857292 | Broadband and wide field angle compensator | Lawrence D. Rotter, Klaus Flock, Muzammil Arain | 2018-01-02 |