Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10006865 | Confined illumination for small spot size metrology | Derrick Shaughnessy, Michael S. Bakeman, Andrei V. Shchegrov, Leonid Poslavsky | 2018-06-26 |
| 9970863 | Optical metrology with reduced focus error sensitivity | Shankar Krishnan, David Y. Wang, Xuefeng Liu | 2018-05-15 |