Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10012606 | X-ray based metrology with primary and secondary illumination sources | Xuena Zhang | 2018-07-03 |
| 10013518 | Model building and analysis engine for combined X-ray and optical metrology | Andrei V. Shchegrov, Qiang Zhao, Zhengquan Tan | 2018-07-03 |
| 10006865 | Confined illumination for small spot size metrology | Derrick Shaughnessy, Guorong V. Zhuang, Andrei V. Shchegrov, Leonid Poslavsky | 2018-06-26 |
| 9885962 | Methods and apparatus for measuring semiconductor device overlay using X-ray metrology | Andrei Veldman, Andrei V. Shchegrov, Walter D. Mieher | 2018-02-06 |