Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10024654 | Method and system for determining in-plane distortions in a substrate | Mark D. Smith, Jose Solomon, Stuart Sherwin, Ady Levy | 2018-07-17 |
| 9885962 | Methods and apparatus for measuring semiconductor device overlay using X-ray metrology | Andrei Veldman, Michael S. Bakeman, Andrei V. Shchegrov | 2018-02-06 |