Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095122 | Systems and methods for fabricating metrology targets with sub-resolution features | Myungjun Lee | 2018-10-09 |
| 10030965 | Model-based hot spot monitoring | Stilian Ivanov Pandev, Sanjay Kapasi, Ady Levy | 2018-07-24 |
| 10024654 | Method and system for determining in-plane distortions in a substrate | Jose Solomon, Stuart Sherwin, Walter D. Mieher, Ady Levy | 2018-07-17 |
| 10018919 | System and method for fabricating metrology targets oriented with an angle rotated with respect to device features | Myungjun Lee | 2018-07-10 |
| 10007191 | Method for computer modeling and simulation of negative-tone-developable photoresists | John Biafore, John S. Graves, David Blankenship, Alessandro Vaglio Pret | 2018-06-26 |