Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095122 | Systems and methods for fabricating metrology targets with sub-resolution features | Mark D. Smith | 2018-10-09 |
| 10018919 | System and method for fabricating metrology targets oriented with an angle rotated with respect to device features | Mark D. Smith | 2018-07-10 |