Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151986 | Signal response metrology based on measurements of proxy structures | Andrei V. Shchegrov, Stilian Ivanov Pandev, Leonid Poslavsky | 2018-12-11 |
| 10152678 | System, method and computer program product for combining raw data from multiple metrology tools | Stilian Ivanov Pandev, Andrei V. Shchegrov | 2018-12-11 |