Issued Patents 2017
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831083 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Daigo YAMAGUCHI, Tsukasa Kamakura, Tsuyoshi Takeda, Taketoshi Sato | 2017-11-28 |
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Tsukasa Kamakura +1 more | 2017-11-28 |
| 9824883 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Arito OGAWA | 2017-11-21 |
| 9816183 | Substrate processing apparatus | Motoshi Sawada | 2017-11-14 |
| 9816182 | Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium | Hideto Tateno, Yuichi Wada, Keishin Yamazaki, Takurou Ushida, Iwao Nakamura +1 more | 2017-11-14 |
| 9812355 | Method of manufacturing semiconductor device | Kimihiko NAKATANI | 2017-11-07 |
| 9728409 | Method of manufacturing semiconductor device | Kazuhiro Harada, Kimihiko NAKATANI | 2017-08-08 |
| 9728400 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima | 2017-08-08 |
| 9698050 | Method of manufacturing semiconductor device | Naofumi Ohashi, Tsuyoshi Takeda, Toshiyuki Kikuchi | 2017-07-04 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Takaaki Noda, Shingo NOHARA, Satoshi Shimamoto, Takeo Hanashima, Yoshiro Hirose +1 more | 2017-06-06 |
| 9659767 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Atsushi Sano, Tadashi Takasaki | 2017-05-23 |
| 9587313 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Yuichi Wada, Hideto Tateno, Harunobu Sakuma | 2017-03-07 |
| 9558937 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kimihiko NAKATANI, Kazuhiro Harada, Ryuji Yamamoto | 2017-01-31 |
| 9536734 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima | 2017-01-03 |