Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2017-11-28 |
| 9793107 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Shingo NOHARA, Yoshiro Hirose, Kiyohiko Maeda | 2017-10-17 |
| 9698007 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Shingo NOHARA, Yoshiro Hirose, Kiyohiko Maeda | 2017-07-04 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Shingo NOHARA, Satoshi Shimamoto, Hiroshi Ashihara, Takeo Hanashima, Yoshiro Hirose +1 more | 2017-06-06 |
| 9653326 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masatoshi Takada | 2017-05-16 |