Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2017-11-28 |
| 9728400 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroshi Ashihara | 2017-08-08 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Takaaki Noda, Shingo NOHARA, Satoshi Shimamoto, Hiroshi Ashihara, Yoshiro Hirose +1 more | 2017-06-06 |
| 9536734 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroshi Ashihara | 2017-01-03 |