Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara +1 more | 2017-11-28 |
| 9831083 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Daigo YAMAGUCHI, Hiroshi Ashihara, Tsuyoshi Takeda, Taketoshi Sato | 2017-11-28 |
| 9732421 | Substrate processing apparatus | — | 2017-08-15 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Takaaki Noda, Shingo NOHARA, Satoshi Shimamoto, Hiroshi Ashihara, Takeo Hanashima +1 more | 2017-06-06 |
| 9640387 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose, Satoshi Shimamoto | 2017-05-02 |