Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831083 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Daigo YAMAGUCHI, Tsukasa Kamakura, Hiroshi Ashihara, Tsuyoshi Takeda | 2017-11-28 |
| 9587314 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hiroaki Hiramatsu, Yukitomo HIROCHI | 2017-03-07 |