Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741556 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Satoshi Shimamoto | 2017-08-22 |
| D791476 | Tool case | — | 2017-07-11 |
| 9640387 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura, Yoshiro Hirose, Satoshi Shimamoto | 2017-05-02 |
| 9613798 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Satoshi Shimamoto | 2017-04-04 |
| 9587308 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kenji Kameda, Yuji Urano | 2017-03-07 |
| 9558937 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kimihiko NAKATANI, Kazuhiro Harada, Hiroshi Ashihara | 2017-01-31 |