Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761456 | Method of manufacturing semiconductor device and substrate processing apparatus | Kimihiko NAKATANI, Masahito Kitamura | 2017-09-12 |
| 9728409 | Method of manufacturing semiconductor device | Kimihiko NAKATANI, Hiroshi Ashihara | 2017-08-08 |
| 9558937 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kimihiko NAKATANI, Hiroshi Ashihara, Ryuji Yamamoto | 2017-01-31 |