Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812355 | Method of manufacturing semiconductor device | Hiroshi Ashihara | 2017-11-07 |
| 9761456 | Method of manufacturing semiconductor device and substrate processing apparatus | Kazuhiro Harada, Masahito Kitamura | 2017-09-12 |
| 9728409 | Method of manufacturing semiconductor device | Kazuhiro Harada, Hiroshi Ashihara | 2017-08-08 |
| 9558937 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kazuhiro Harada, Hiroshi Ashihara, Ryuji Yamamoto | 2017-01-31 |