Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761456 | Method of manufacturing semiconductor device and substrate processing apparatus | Kimihiko NAKATANI, Kazuhiro Harada | 2017-09-12 |
| 9735007 | Method of processing substrate, substrate processing apparatus, and recording medium | Takahiro Morikawa | 2017-08-15 |