Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9683288 | Method of manufacturing semiconductor device and method of cleaning processing vessel | Jun Sonobe, Yudai Tadaki | 2017-06-20 |
| 9587308 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yuji Urano | 2017-03-07 |
| 9540727 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Jun Sonobe, Yudai Tadaki | 2017-01-10 |