Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9683288 | Method of manufacturing semiconductor device and method of cleaning processing vessel | Kenji Kameda, Yudai Tadaki | 2017-06-20 |
| 9540727 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Kenji Kameda, Yudai Tadaki | 2017-01-10 |