Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620357 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada | 2017-04-11 |
| 9587308 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kenji Kameda, Ryuji Yamamoto | 2017-03-07 |