Issued Patents 2017
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837261 | Method of manufacturing semiconductor device and substrate processing method | Atsushi Sano, Yugo Orihashi, Yoshitomo HASHIMOTO, Satoshi Shimamoto | 2017-12-05 |
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2017-11-28 |
| 9816181 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano | 2017-11-14 |
| 9793107 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Satoshi Shimamoto, Shingo NOHARA, Kiyohiko Maeda | 2017-10-17 |
| 9773661 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Satoshi Shimamoto | 2017-09-26 |
| 9761437 | Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus | Yosuke Ota | 2017-09-12 |
| 9741556 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Satoshi Shimamoto | 2017-08-22 |
| 9741555 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka, Katsuyoshi Harada | 2017-08-22 |
| 9735006 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano | 2017-08-15 |
| 9732426 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Atsushi Sano | 2017-08-15 |
| 9711348 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano | 2017-07-18 |
| 9704703 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Atsushi Sano | 2017-07-11 |
| 9698007 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Satoshi Shimamoto, Shingo NOHARA, Kiyohiko Maeda | 2017-07-04 |
| 9691606 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Yoshinobu Nakamura, Ryota Sasajima | 2017-06-27 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Takaaki Noda, Shingo NOHARA, Satoshi Shimamoto, Hiroshi Ashihara, Takeo Hanashima +1 more | 2017-06-06 |
| 9640387 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Tsukasa Kamakura, Satoshi Shimamoto | 2017-05-02 |
| 9620357 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada, Yuji Urano | 2017-04-11 |
| 9613798 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Satoshi Shimamoto | 2017-04-04 |
| 9607827 | Method of manufacturing semiconductor device, and recording medium | Atsushi Sano, Katsuyoshi Harada | 2017-03-28 |
| 9583338 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka | 2017-02-28 |
| 9548198 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Norikazu Mizuno, Kazutaka Yanagita, Shingo Okubo | 2017-01-17 |