Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633838 | Vapor deposition of silicon-containing films using penta-substituted disilanes | Jean-Marc Girard, Changhee Ko, Ivan Oshchepkov, Shingo Okubo, Naoto NODA +1 more | 2017-04-25 |
| 9548198 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Norikazu Mizuno, Shingo Okubo | 2017-01-17 |