Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9777025 | Si-containing film forming precursors and methods of using the same | Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov, Reno Pesaresi | 2017-10-03 |
| 9719167 | Cobalt-containing film forming compositions, their synthesis, and use in film deposition | Satoko Gatineau, Mikiko Kimura, Christian Dussarrat, Nicolas Blasco | 2017-08-01 |
| 9633838 | Vapor deposition of silicon-containing films using penta-substituted disilanes | Changhee Ko, Ivan Oshchepkov, Kazutaka Yanagita, Shingo Okubo, Naoto NODA +1 more | 2017-04-25 |