Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633838 | Vapor deposition of silicon-containing films using penta-substituted disilanes | Jean-Marc Girard, Changhee Ko, Kazutaka Yanagita, Shingo Okubo, Naoto NODA +1 more | 2017-04-25 |