Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831088 | Composition and process for selectively etching metal nitrides | Tianniu Chen, Nicole E. Thomas, Steven Lippy, Jeffrey A. Barnes, Emanuel I. Cooper | 2017-11-28 |
| 9777025 | Si-containing film forming precursors and methods of using the same | Jean-Marc Girard, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov, Reno Pesaresi | 2017-10-03 |
| RE46427 | Antioxidants for post-CMP cleaning formulations | David Angst, Jeffrey A. Barnes, Prerna Sonthalia, Emanuel I. Cooper, Karl E. Boggs | 2017-06-06 |