Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831088 | Composition and process for selectively etching metal nitrides | Tianniu Chen, Nicole E. Thomas, Jeffrey A. Barnes, Emanuel I. Cooper, Peng Zhang | 2017-11-28 |
| 9546321 | Compositions and methods for selectively etching titanium nitride | Jeffrey A. Barnes, Emanuel I. Cooper, Li-Min Chen, Rekha Rajaram, Sheng-Hung Tu | 2017-01-17 |