Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831088 | Composition and process for selectively etching metal nitrides | Tianniu Chen, Nicole E. Thomas, Steven Lippy, Emanuel I. Cooper, Peng Zhang | 2017-11-28 |
| RE46427 | Antioxidants for post-CMP cleaning formulations | David Angst, Peng Zhang, Prerna Sonthalia, Emanuel I. Cooper, Karl E. Boggs | 2017-06-06 |
| 9546321 | Compositions and methods for selectively etching titanium nitride | Emanuel I. Cooper, Li-Min Chen, Steven Lippy, Rekha Rajaram, Sheng-Hung Tu | 2017-01-17 |