TC

Tianniu Chen

EN Entegris: 6 patents #1 of 149Top 1%
📍 Westford, MA: #6 of 182 inventorsTop 4%
🗺 Massachusetts: #406 of 13,044 inventorsTop 4%
Overall (2017): #17,881 of 506,227Top 4%
6
Patents 2017

Issued Patents 2017

Showing 1–6 of 6 patents

Patent #TitleCo-InventorsDate
9831088 Composition and process for selectively etching metal nitrides Nicole E. Thomas, Steven Lippy, Jeffrey A. Barnes, Emanuel I. Cooper, Peng Zhang 2017-11-28
9783558 Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films Ziyun Wang, Chongying Xu, Bryan C. Hendrix, Jeffrey F. Roeder, Thomas H. Baum 2017-10-10
9731368 Apparatus and method for stripping solder metals during the recycling of waste electrical and electronic equipment Michael B. Korzenski, Ping Jiang 2017-08-15
9649712 Apparatus and method for stripping solder metals during the recycling of waste electrical and electronic equipment Michael B. Korzenski, Ping Jiang 2017-05-16
9534285 Precursor compositions for atomic layer deposition and chemical vapor deposition of titanate, lanthanate, and tantalate dielectric films Chongying Xu, Thomas M. Cameron, Jeffrey F. Roeder, Thomas H. Baum 2017-01-03
9537095 Tellurium compounds useful for deposition of tellurium containing materials Matthias Stender, Chongying Xu, William Hunks, Philip S. H. Chen, Jeffrey F. Roeder +1 more 2017-01-03