Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9637395 | Fluorine free tungsten ALD/CVD process | Weimin Li, David W. Peters, Scott L. Battle | 2017-05-02 |
| 9537095 | Tellurium compounds useful for deposition of tellurium containing materials | Matthias Stender, Chongying Xu, Tianniu Chen, Philip S. H. Chen, Jeffrey F. Roeder +1 more | 2017-01-03 |