Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9637395 | Fluorine free tungsten ALD/CVD process | Weimin Li, Scott L. Battle, William Hunks | 2017-05-02 |
| 9540408 | Cobalt precursors for low temperature ALD or CVD of cobalt-based thin films | — | 2017-01-10 |