Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783558 | Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films | Ziyun Wang, Bryan C. Hendrix, Jeffrey F. Roeder, Tianniu Chen, Thomas H. Baum | 2017-10-10 |
| 9534285 | Precursor compositions for atomic layer deposition and chemical vapor deposition of titanate, lanthanate, and tantalate dielectric films | Tianniu Chen, Thomas M. Cameron, Jeffrey F. Roeder, Thomas H. Baum | 2017-01-03 |
| 9537095 | Tellurium compounds useful for deposition of tellurium containing materials | Matthias Stender, Tianniu Chen, William Hunks, Philip S. H. Chen, Jeffrey F. Roeder +1 more | 2017-01-03 |