TC

Thomas M. Cameron

EN Entegris: 1 patents #40 of 149Top 30%
Overall (2017): #220,297 of 506,227Top 45%
1
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9534285 Precursor compositions for atomic layer deposition and chemical vapor deposition of titanate, lanthanate, and tantalate dielectric films Chongying Xu, Tianniu Chen, Jeffrey F. Roeder, Thomas H. Baum 2017-01-03