Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9822132 | Hexacoordinate silicon-containing precursors for ALD/CVD silicon-containing film applications | Glenn Kuchenbeiser, Venkateswara R. Pallem | 2017-11-21 |
| 9719167 | Cobalt-containing film forming compositions, their synthesis, and use in film deposition | Satoko Gatineau, Mikiko Kimura, Jean-Marc Girard, Nicolas Blasco | 2017-08-01 |
| 9711347 | Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films | Venkateswara R. Pallem, Wontae Noh | 2017-07-18 |
| 9663547 | Silicon- and Zirconium-containing compositions for vapor deposition of Zirconium-containing films | Clément Lansalot-Matras, Julien Lieffrig, Hana Ishii | 2017-05-30 |
| 9593133 | Organosilane precursors for ALD/CVD silicon-containing film applications | Glenn Kuchenbeiser, Venkateswara R. Pallem | 2017-03-14 |
| 9583335 | Method of forming dielectric films, new precursors and their use in semiconductor manufacturing | Nicolas Blasco, Audrey Pinchart, Christophe Lachaud | 2017-02-28 |