Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9822132 | Hexacoordinate silicon-containing precursors for ALD/CVD silicon-containing film applications | Glenn Kuchenbeiser, Christian Dussarrat | 2017-11-21 |
| 9773679 | Method of etching semiconductor structures with etch gas | Rahul Gupta, Vijay Surla, Curtis Anderson, Nathan Stafford | 2017-09-26 |
| 9773683 | Atomic layer or cyclic plasma etching chemistries and processes | Rahul Gupta, Benjamin Jurcik | 2017-09-26 |
| 9711347 | Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films | Christian Dussarrat, Wontae Noh | 2017-07-18 |
| 9701695 | Synthesis methods for amino(halo)silanes | Glenn Kuchenbeiser, Guillaume Husson | 2017-07-11 |
| 9659788 | Nitrogen-containing compounds for etching semiconductor structures | Vijay Surla, Rahul Gupta | 2017-05-23 |
| 9593133 | Organosilane precursors for ALD/CVD silicon-containing film applications | Christian Dussarrat, Glenn Kuchenbeiser | 2017-03-14 |