Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773679 | Method of etching semiconductor structures with etch gas | Rahul Gupta, Venkateswara R. Pallem, Curtis Anderson, Nathan Stafford | 2017-09-26 |
| 9659788 | Nitrogen-containing compounds for etching semiconductor structures | Rahul Gupta, Venkateswara R. Pallem | 2017-05-23 |