Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793107 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Satoshi Shimamoto, Shingo NOHARA, Yoshiro Hirose | 2017-10-17 |
| 9698007 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Satoshi Shimamoto, Shingo NOHARA, Yoshiro Hirose | 2017-07-04 |
| 9666430 | Method of manufacturing semiconductor device and substrate processing apparatus | Yasunobu Koshi, Keigo NISHIDA | 2017-05-30 |