Issued Patents 2017
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837261 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yugo Orihashi, Yoshitomo HASHIMOTO | 2017-12-05 |
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2017-11-28 |
| 9793107 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Yoshiro Hirose, Kiyohiko Maeda | 2017-10-17 |
| 9773661 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Yoshiro Hirose | 2017-09-26 |
| 9741556 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2017-08-22 |
| 9732426 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Atsushi Sano | 2017-08-15 |
| 9698007 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Yoshiro Hirose, Kiyohiko Maeda | 2017-07-04 |
| 9685455 | Method of manufacturing semiconductor device having 3D structure | Takashi Nakagawa | 2017-06-20 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Takaaki Noda, Shingo NOHARA, Hiroshi Ashihara, Takeo Hanashima, Yoshiro Hirose +1 more | 2017-06-06 |
| 9640387 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Tsukasa Kamakura, Yoshiro Hirose | 2017-05-02 |
| 9613798 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2017-04-04 |