Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837261 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yoshitomo HASHIMOTO, Satoshi Shimamoto | 2017-12-05 |
| 9691609 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Kotaro Murakami | 2017-06-27 |
| 9540728 | Substrate processing apparatus, apparatus for manufacturing semiconductor device, and gas supply system | Atsushi Moriya, Naoharu Nakaiso, Kotaro Murakami | 2017-01-10 |