Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691609 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Yugo Orihashi | 2017-06-27 |
| 9540728 | Substrate processing apparatus, apparatus for manufacturing semiconductor device, and gas supply system | Atsushi Moriya, Naoharu Nakaiso, Yugo Orihashi | 2017-01-10 |