Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837261 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yugo Orihashi, Satoshi Shimamoto | 2017-12-05 |
| 9741555 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Tatsuru Matsuoka, Katsuyoshi Harada | 2017-08-22 |
| 9704703 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Atsushi Sano | 2017-07-11 |
| 9691606 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Katsuyoshi Harada, Yoshinobu Nakamura, Ryota Sasajima | 2017-06-27 |
| 9620357 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada, Yuji Urano | 2017-04-11 |
| 9583338 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Tatsuru Matsuoka | 2017-02-28 |