Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741555 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Tatsuru Matsuoka | 2017-08-22 |
| 9691606 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Yoshinobu Nakamura, Ryota Sasajima | 2017-06-27 |
| 9620357 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Yuji Urano | 2017-04-11 |
| 9607827 | Method of manufacturing semiconductor device, and recording medium | Yoshiro Hirose, Atsushi Sano | 2017-03-28 |