Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824883 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Hiroshi Ashihara | 2017-11-21 |
| 9745656 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium | Tsuyoshi Takeda | 2017-08-29 |
| 9666439 | Method of manufacturing a semiconductor device and recording medium | — | 2017-05-30 |
| 9653301 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Sadayoshi Horii, Hideharu Itatani | 2017-05-16 |
| 9653351 | Method of manufacturing semiconductor device | Atsuro SEINO | 2017-05-16 |