Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786493 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsushi UEDA, Junichi Tanabe, Katsuhiko Yamamoto, Yuki TAIRA, Naofumi Ohashi | 2017-10-10 |
| 9653301 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Sadayoshi Horii, Arito OGAWA | 2017-05-16 |