Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786493 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsushi UEDA, Junichi Tanabe, Katsuhiko Yamamoto, Yuki TAIRA, Hideharu Itatani | 2017-10-10 |
| 9735068 | Method of manufacturing semiconductor device | Masanori NAKAYAMA, Atsuhiko Suda, Kazuyuki Toyoda, Shun MATSUI | 2017-08-15 |
| 9728431 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi, Shun MATSUI, Tadashi Takasaki | 2017-08-08 |
| 9698050 | Method of manufacturing semiconductor device | Hiroshi Ashihara, Tsuyoshi Takeda, Toshiyuki Kikuchi | 2017-07-04 |
| 9666477 | Method of manufacturing semiconductor device | Satoshi Takano | 2017-05-30 |