Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786493 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Junichi Tanabe, Katsuhiko Yamamoto, Yuki TAIRA, Naofumi Ohashi, Hideharu Itatani | 2017-10-10 |
| 9754780 | Substrate processing method and substrate processing apparatus | Tadashi Terasaki, Unryu Ogawa, Akito Hirano | 2017-09-05 |
| 9748132 | Substrate processing apparatus, method for manufacturing semiconductor device, method for processing substrates | Koichiro Harada, Noriaki MICHITA, Takayuki Sato | 2017-08-29 |